1 edition of Technological advances in micro and submicro photofabrication imagery found in the catalog.
Technological advances in micro and submicro photofabrication imagery
1975 by Society of Photo-optical Instrumentation Engineers in Palos Verdes Estates, Calif .
Written in English
|Statement||editors, J.M. Graf, William Converse.|
|Series||Proceedings of the Society of Photo-optical Instrumentation Engineers ; v. 55, Proceedings of the Society of Photo-optical Instrumentation Engineers ;, v. 55.|
|Contributions||Graf, J. M., Converse, William.|
|LC Classifications||TK7874 .T43|
|The Physical Object|
|Pagination||viii, 136 p. :|
|Number of Pages||136|
|LC Control Number||76357435|
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Get this from a library. Technological advances in micro and submicro photofabrication imagery; [seminar]. [J M Graf; William Converse; United States. Air Force. Office of Scientific Research.;]. Get this from a library.
Technological Advances in Micro and Submicro Photofabrication Imagery. [William Converse]. Proc. SPIETechnological Advances in Micro and Submicro Photofabrication Imagery, pg (1 March ); doi: / Read Abstract + The rapid progress and growth which has been made in the semiconductor industry over the past decade has been due to the improvements in processes and equipment to manufacture integrated circuits.
The fundamental function of lithography is to transfer the pattern to the wafer itself. In Technological Advances in Micro and Submicro Photofabrication and Imagery, ed.
Graf and W. Converse, Proc. SPIE, Vol. 55 In Technological Advances in Micro and Submicro Photofabrication Imagery, ed. Graf and W. Converse, Proc. SPIE. This book focuses on the latest development of devices and fabrication processes in the field of extremely miniaturized electromechanical systems.
The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and. Technological advances in micro and submicro photofabrication imagery: [seminar], August, S Micro '97 proceedings: 14th Australian Microelectronics Conference: microelectronics, technology today International conference on microelectronics, 3rd.
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